Invention Grant
- Patent Title: Plasma generator using dielectric resonator
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Application No.: US15287236Application Date: 2016-10-06
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Publication No.: US09706635B2Publication Date: 2017-07-11
- Inventor: Jovan Jevtic , Ashok Menon , Velibor Pikelja
- Applicant: Radom Corporation
- Applicant Address: US WI West Allis
- Assignee: Radom Corporation
- Current Assignee: Radom Corporation
- Current Assignee Address: US WI West Allis
- Agency: Boyle Fredrickson, S.C.
- Main IPC: G01N21/73
- IPC: G01N21/73 ; H05H1/46 ; G01N22/00 ; H01J49/10 ; G21B1/05 ; H01J37/32 ; H05H1/30 ; G01N21/71 ; H01S3/0975
Abstract:
A dielectric resonator is excited at its natural resonant frequency to produce a highly uniform electric field for the generation of plasma. The plasma may be used in a optical or mass spectrometer.
Public/Granted literature
- US20170027051A1 Plasma Generator Using Dielectric Resonator Public/Granted day:2017-01-26
Information query
