Invention Grant
- Patent Title: Pressure sensor and method for manufacturing the same
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Application No.: US14734043Application Date: 2015-06-09
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Publication No.: US09709453B2Publication Date: 2017-07-18
- Inventor: Tomohide Minami
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2014-133255 20140627
- Main IPC: G01L21/12
- IPC: G01L21/12

Abstract:
Disclosed is a method for manufacturing a sensor module that generates heat through an electric resistor adapted to be exposed to a gas, and outputs a temperature change caused in the electric resistor according to a pressure of the gas, as a resistance change of the electric resistor. The method includes: forming an insulation layer on a substrate in which the insulation layer is an oxide film or a nitride film; and forming a conductor layer on the insulation layer under a temperature condition of 300° C. to 600° C., in which the conductor layer serves as the electric resistor.
Public/Granted literature
- US20150377735A1 PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-12-31
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