- Patent Title: Acceleration sensor and method for producing an acceleration sensor
-
Application No.: US14888432Application Date: 2014-03-27
-
Publication No.: US09709596B2Publication Date: 2017-07-18
- Inventor: Wolfram Geiger , Julian Bartholomeyczik , Peter Leinfelder
- Applicant: Northrop Grumman LITEF GmbH
- Applicant Address: DE
- Assignee: Northrop Grumman LITEF GmbH
- Current Assignee: Northrop Grumman LITEF GmbH
- Current Assignee Address: DE
- Agency: Tarolli, Sundheim, Covell & Tummino LLP
- Priority: DE102013007593 20130502
- International Application: PCT/EP2014/000833 WO 20140327
- International Announcement: WO2014/177243 WO 20141106
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08

Abstract:
The invention relates to an acceleration sensor, comprising a substrate having a substrate surface and a sample mass that is movable relative to the substrate in a first direction (x) parallel to the substrate surface. The sample mass has a comb-like electrode that is movable together with the sample mass and has a plurality of teeth, which extend in the first direction (x). The acceleration sensor further comprises a counter-electrode fixedly connected to the substrate, which counter-electrode has a fixed comb-like electrode and wherein said fixed comb-like electrode has a plurality of teeth which extend in a direction opposite to the first direction (x). The teeth of the movable comb-like electrode engage with the teeth of the fixed comb-like electrode. The acceleration sensor further comprises a shielding electrode fixedly connected to the substrate and which is suitable for increasing a pneumatic damping of the sample mass during a deflection movement of the sample mass.
Public/Granted literature
- US20160069928A1 Acceleration Sensor and Method for Producing an Acceleration Sensor Public/Granted day:2016-03-10
Information query
IPC分类: