Invention Grant
- Patent Title: Membrane probe card
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Application No.: US14151208Application Date: 2014-01-09
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Publication No.: US09709599B2Publication Date: 2017-07-18
- Inventor: Ming-Cheng Hsu
- Applicant: Taiwan Semiconductor Manufacturing CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/073 ; G01R31/00 ; G01R31/28 ; G01R1/04 ; G01R31/26
Abstract:
An apparatus includes a membrane film and a plurality of needle tips with cylinder shapes. The membrane film includes a plurality of signal traces. The needle tips are disposed on the membrane film and are electrically connected to the signal traces. The needle tips are configured to probe a device-under-test (DUT).
Public/Granted literature
- US20150192609A1 Membrane Probe Card Public/Granted day:2015-07-09
Information query
