Invention Grant
- Patent Title: Support elements for an optical element
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Application No.: US14658459Application Date: 2015-03-16
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Publication No.: US09709895B2Publication Date: 2017-07-18
- Inventor: Jens Kugler , Ulrich Weber , Nicolai Wengert
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102008049746 20080930
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20 ; G02B7/00 ; G02B7/02

Abstract:
Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
Public/Granted literature
- US20150316853A1 SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT Public/Granted day:2015-11-05
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