Invention Grant
- Patent Title: Polarization control of pulsed light beam
-
Application No.: US14925641Application Date: 2015-10-28
-
Publication No.: US09709897B2Publication Date: 2017-07-18
- Inventor: Eric Anders Mason , Omar Zurita , Gregory Allen Rechtsteiner , Robert Jay Rafac , Ivan B. Lalovic
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42 ; G03F7/20

Abstract:
A photolithography system includes an optical system, an actuation apparatus, and a control module. The optical system includes an optical source that produces a pulsed light beam traveling along a beam path; a plurality of optical components positioned between the optical source and a photolithography exposure apparatus, at least some of the plurality of optical components configured to receive the pulsed light beam and direct the pulsed light beam to the photolithography exposure apparatus; and an optical element positioned to interact with the pulsed light beam. The actuation apparatus is coupled to the optical element. The actuation apparatus is configured to adjust a physical property of the optical element based on a control signal from the control module to thereby adjust a polarization of the pulsed light beam.
Public/Granted literature
- US20170123324A1 POLARIZATION CONTROL OF PULSED LIGHT BEAM Public/Granted day:2017-05-04
Information query