Invention Grant
- Patent Title: Process for fabricating an integrated circuit cointegrating a FET transistor and an OxRAM memory location
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Application No.: US15094011Application Date: 2016-04-08
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Publication No.: US09711567B2Publication Date: 2017-07-18
- Inventor: Laurent Grenouillet , Yves Morand , Maud Vinet
- Applicant: Commissariat a l'energie atomique et aux energies alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1553070 20150409
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L27/00 ; H01L29/00 ; H01L45/00 ; H01L27/24 ; H01L23/31 ; H01L29/06 ; H01L29/51 ; H01L29/66

Abstract:
The invention relates to a process for fabricating an integrated circuit (1), comprising the steps of: providing a substrate (100), the substrate being equipped with first and second dummy gates and with an encapsulation layer (106); removing the first and second dummy gates in order to make first and second grooves (23, 33) in said encapsulation layer (106); simultaneously depositing a gate insulating layer (107) at least in the bottom of the first groove and on a side wall of the second groove; forming a gate electrode of said transistor (2) in the first groove, forming source and drain electrodes of said transistor on either side of said gate electrode, forming first and second electrodes of said memory cell on either side of said gate insulating layer deposited on a side wall of the second groove.
Public/Granted literature
- US20160300884A1 METHOD FOR FABRICATING AN INTEGRATED CIRCUIT CO-INTEGRATING A FET TRANSISTOR AND AN OXRAM MEMORY POINT Public/Granted day:2016-10-13
Information query
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