Process for fabricating an integrated circuit cointegrating a FET transistor and an OxRAM memory location
Abstract:
The invention relates to a process for fabricating an integrated circuit (1), comprising the steps of: providing a substrate (100), the substrate being equipped with first and second dummy gates and with an encapsulation layer (106); removing the first and second dummy gates in order to make first and second grooves (23, 33) in said encapsulation layer (106); simultaneously depositing a gate insulating layer (107) at least in the bottom of the first groove and on a side wall of the second groove; forming a gate electrode of said transistor (2) in the first groove, forming source and drain electrodes of said transistor on either side of said gate electrode, forming first and second electrodes of said memory cell on either side of said gate insulating layer deposited on a side wall of the second groove.
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