Invention Grant
- Patent Title: Method and apparatus for measuring scattering intensity distribution
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Application No.: US14651813Application Date: 2013-12-10
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Publication No.: US09714907B2Publication Date: 2017-07-25
- Inventor: Tadashi Matsushita , Wolfgang Voegeli , Tetsuro Shirasawa , Toshio Takahashi , Etsuo Arakawa
- Applicant: Inter-University Research Institute Corporation High Energy Accelerator Research Organization
- Applicant Address: JP Ibaraki
- Assignee: Inter-University Research Institute Corporation High Energy Accelerator Research Organization
- Current Assignee: Inter-University Research Institute Corporation High Energy Accelerator Research Organization
- Current Assignee Address: JP Ibaraki
- Agency: MKG LLC
- Priority: JP2012-273064 20121214
- International Application: PCT/JP2013/083064 WO 20131210
- International Announcement: WO2014/092073 WO 20140619
- Main IPC: G01N23/20
- IPC: G01N23/20

Abstract:
It is an object of the present invention to provide a method and an apparatus for measuring a scattering intensity distribution capable of measuring a scattering intensity distribution in a reciprocal space in a short time. The method or apparatus for measuring a scattering intensity distribution causes X-rays emitted from an X-ray source (101) to be reflected by an X-ray optical element (102) so as to converge in the vicinity of a surface of a sample (SA), causes monochromatic X-rays condensed after passing through a plurality of optical paths to be incident on the sample at glancing angles (ω) that differ depending on the respective optical paths at a time in a state in which there is a correlation between an angle formed by each optical path of the monochromatic X-rays and a reference plane, and an angle formed by each optical path and a plane including the normal of the reference plane and an optical path located in the center of the respective optical paths, detects scattering intensities of the monochromatic X-rays scattered by the sample using a two-dimensional detector (103) and calculates a scattering intensity distribution in the reciprocal space based on the scattering intensity distribution detected by the two-dimensional detector and the correlation.
Public/Granted literature
- US20160069825A1 METHOD AND APPARATUS FOR MEASURING SCATTERING INTENSITY DISTRIBUTION Public/Granted day:2016-03-10
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