Invention Grant
- Patent Title: Thin capping for MEMS devices
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Application No.: US14914015Application Date: 2014-08-26
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Publication No.: US09718674B2Publication Date: 2017-08-01
- Inventor: Edvard Kalvesten , Thorbjorn Ebefors , Niklas Svedin
- Applicant: SILEX MICROSYSTEMS AB
- Applicant Address: SE Jarfalla
- Assignee: SILEX MICROSYSTEMS AB
- Current Assignee: SILEX MICROSYSTEMS AB
- Current Assignee Address: SE Jarfalla
- Agency: Young & Thompson
- Priority: SE1350972 20130826; SE1350980 20130827
- International Application: PCT/SE2014/050973 WO 20140826
- International Announcement: WO2015/030657 WO 20150305
- Main IPC: H01L23/08
- IPC: H01L23/08 ; B81B7/00 ; H01L21/50 ; B81C1/00 ; H01L23/00

Abstract:
A device includes a base substrate (700) with a micro component (702) attached thereto. Suitably it is provided with routing elements (704) for conducting signals to and from the component (702). It also includes spacer members (706) which also can act as conducting structures for routing signals vertically. There is a capping structure (708) of a glass material, provided above the base substrate (700), bonded via the spacer members (706), preferably by eutectic bonding, wherein the capping structure (708) includes vias (710) including metal for providing electrical connection through the capping structure. The vias can be made by a stamping/pressing method entailing pressing needles under heating to soften the glass and applying pressure, to a predetermined depth in the glass. However, other methods are possible, e-g- drilling, etching, blasting.
Public/Granted literature
- US20160207758A1 THIN CAPPING FOR MEMS DEVICES Public/Granted day:2016-07-21
Information query
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