- Patent Title: Method of supporting a workpiece during physical vapour deposition
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Application No.: US13528027Application Date: 2012-06-20
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Publication No.: US09719166B2Publication Date: 2017-08-01
- Inventor: Stephen R Burgess
- Applicant: Stephen R Burgess
- Applicant Address: GB Newport
- Assignee: SPTS TECHNOLOGIES LIMITED
- Current Assignee: SPTS TECHNOLOGIES LIMITED
- Current Assignee Address: GB Newport
- Agency: Volentine & Whitt, PLLC
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/32 ; C23C14/35 ; C23C14/50 ; C23C14/54 ; H01J37/32 ; H01J37/34
Abstract:
Methods and related apparatus support a work piece during a physical vapor deposition. An aluminium support having a support surface coated with a heat absorbent coating is provided. The support is cooled to around 100° C. and a PVD process is performed such that, with cooling, the work piece temperature is between 350° C. and 450° C. The coating is inert and/or ultra-high voltage compatible.
Public/Granted literature
- US20120325649A1 METHOD OF SUPPORTING A WORKPIECE DURING PHYSICAL VAPOUR DEPOSITION Public/Granted day:2012-12-27
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