The present invention provides a method of measuring a shape of a surface of an object, the method including obtaining shape data for each of a plurality of regions on the surface by a surface measurement for each of the plurality of regions, each of the plurality of regions having a region overlapping another of the plurality of regions, obtaining an error of the surface measurements so as to minimize a difference in shape with respect to the overlapping regions based on the obtained shape data, and obtaining the shape of the surface based on the obtained shape data and the obtained error, wherein the shape data is obtained so as not to include a component having a spatial frequency higher than a threshold determined based on a required precision.