Invention Grant
- Patent Title: Feature and depth measurement using multiple beam sources and interferometry
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Application No.: US14676070Application Date: 2015-04-01
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Publication No.: US09719776B2Publication Date: 2017-08-01
- Inventor: Parviz Tayebati
- Applicant: Parviz Tayebati
- Applicant Address: US MA Wilmington
- Assignee: TERADIODE, INC.
- Current Assignee: TERADIODE, INC.
- Current Assignee Address: US MA Wilmington
- Agency: Morgan, Lewis & Bockius LLP
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/06 ; G01B9/02 ; B23K26/03 ; B23K26/06
Abstract:
Systems and techniques for processing materials using wavelength beam combining for high-power operation in concert with interferometry to detect the depth or height of features as they are created.
Public/Granted literature
- US20150276381A1 FEATURE AND DEPTH MEASUREMENT USING MULTIPLE BEAM SOURCES AND INTERFEROMETRY Public/Granted day:2015-10-01
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