Invention Grant
- Patent Title: Load measuring apparatus and load measuring method
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Application No.: US15045643Application Date: 2016-02-17
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Publication No.: US09719869B2Publication Date: 2017-08-01
- Inventor: Hideaki Tanaka
- Applicant: Ebara Corporation
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2015-033910 20150224
- Main IPC: G01L1/04
- IPC: G01L1/04 ; B08B1/04 ; B08B13/00 ; H01L21/67 ; G01L5/00

Abstract:
A load measuring apparatus includes a waterproof load cell having a load measuring surface, of which the length is substantially equal to a diameter of the substrate, and a base plate that supports the waterproof load cell. The load measuring apparatus is set in a substrate cleaning apparatus like a substrate, and measures a load applied from the roll cleaning tool of the substrate cleaning apparatus using the waterproof load cell.
Public/Granted literature
- US20160243592A1 LOAD MEASURING APPARATUS AND LOAD MEASURING METHOD Public/Granted day:2016-08-25
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