Invention Grant
- Patent Title: Pressure sensor and method for manufacturing the same
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Application No.: US14764197Application Date: 2014-02-21
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Publication No.: US09719873B2Publication Date: 2017-08-01
- Inventor: Katsunori Tanida , Takeshi Murata , Naoki Fujimoto , Masao Yamada
- Applicant: DENSO CORPORATION
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2013-35878 20130226; JP2013-251179 20131204; JP2014-11406 20140124; JP2014-17919 20140131
- International Application: PCT/JP2014/000900 WO 20140221
- International Announcement: WO2014/132601 WO 20140904
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L23/28

Abstract:
A method for manufacturing a pressure sensor includes: preparing a stem which has a cylindrical shape with a bottom as a diaphragm; mounting a sensor chip on the diaphragm; preparing a conductive member, in which an internal connection region is integrated with an external connection region electrically connected to an external circuit by an outer frame; forming a first resin mold to couple the internal connection region to the external connection region; separating the outer frame from the internal connection region and the external connection region; arranging the internal connection region in the stem; and electrically connecting the sensor chip and the internal connection region through the first connection member.
Public/Granted literature
- US20150362392A1 PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-12-17
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