Invention Grant
- Patent Title: Optical system and optical quality measuring apparatus
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Application No.: US14632438Application Date: 2015-02-26
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Publication No.: US09719922B2Publication Date: 2017-08-01
- Inventor: Takashi Seki , Hiroyuki Yuki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-038061 20140228
- Main IPC: G01N21/57
- IPC: G01N21/57 ; G01B11/30

Abstract:
An optical system comprising: a light source; a photodetector; a first light-receiving system for causing the photodetector to receive first reflected light with a first angle of reflection from a surface; and a second light-receiving system for causing the photodetector to receive second reflected light with a second angle of reflection, different from the first angle of reflection, from the surface is provided. Here, a first light-receiving area of the photodetector with respect to light, of reflected light from the surface, via the first light-receiving system is spaced apart from a second light-receiving area of the photodetector with respect to light, of the reflected light from the surface, via the second light-receiving system.
Public/Granted literature
- US20150247798A1 OPTICAL SYSTEM AND OPTICAL QUALITY MEASURING APPARATUS Public/Granted day:2015-09-03
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