Invention Grant
- Patent Title: Analysis of molecular contamination in vacuum environments
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Application No.: US15164278Application Date: 2016-05-25
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Publication No.: US09719969B2Publication Date: 2017-08-01
- Inventor: Ruud Johannes Theodorus Soers , Hugo Hubertus Knobel , Pieter Klaas De Bokx
- Applicant: KONINKLIJKE PHILIPS N.V.
- Applicant Address: NL Eindhoven
- Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP10188653 20101025
- Main IPC: G01N30/08
- IPC: G01N30/08 ; G01N1/40 ; G01N33/00 ; B01D53/04 ; G01N30/06 ; B01D53/02 ; G01N30/72 ; G01N30/02

Abstract:
A pre-concentration device is provided for a gas analysis system (10) for collecting molecular contamination in a vacuum environment (11). The pre-concentration device (13) comprises a hollow element (15) having an entrance opening (20) for receiving molecules from the vacuum environment (11) in a collection phase, a gas outlet for transferring collected molecules to a vacuum compatible detector or second preconcentration device in a transfer phase. The device has an inner wall for adsorbing molecules in the collection phase and desorbing molecules in the transfer phase. The device has a filler element (14) that is movable from a first position outside the hollow element in the collection phase to a second position inside the hollow element in the transfer phase which second position leaves open a transfer channel to the gas outlet along the inner wall. Advantageously, the device enables transferring of the organic or inorganic contaminants collected in the device under vacuum conditions, and requires a minimal amount of ultra pure gas for the transport of the contaminants to a detector or further a concentration device, which lowers the lower limit of detection.
Public/Granted literature
- US20160266075A1 ANALYSIS OF MOLECULAR CONTAMINATION IN VACUUM ENVIRONMENTS Public/Granted day:2016-09-15
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