Invention Grant
- Patent Title: Exposure apparatus and method of manufacturing article
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Application No.: US14736423Application Date: 2015-06-11
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Publication No.: US09720333B2Publication Date: 2017-08-01
- Inventor: Ryo Koizumi , Daisuke Kobayashi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-121850 20140612
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20

Abstract:
The present invention provides a scan-type exposure apparatus comprising an aperture stop provided with at least one of a mask stage and a substrate stage and configured to reduce an influence of flare light, wherein an opening of the aperture stop includes a first opening portion corresponding to one shot region on a substrate, and a serrated second opening portion including a plurality of first openings that protrude in a second direction parallel to the scanning direction from a side of the first opening portion along a first direction perpendicular to the scanning direction, and a length of each of the plurality of first openings in the first direction decreases outward in the second direction from the side of the first opening portion along the first direction.
Public/Granted literature
- US20150362845A1 EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2015-12-17
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