Invention Grant
- Patent Title: Stage apparatus, lithography apparatus, method of manufacturing an article, and determination method
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Application No.: US14740705Application Date: 2015-06-16
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Publication No.: US09720334B2Publication Date: 2017-08-01
- Inventor: Satoshi Maruyama , Mitsuo Hirata
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-124684 20140617
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/58 ; G03B27/62 ; G03F7/20

Abstract:
The present invention provides a stage apparatus including a stage being movable, comprising a driving unit configured to drive the stage by providing thrust to the stage, a measuring unit configured to measure a position of the stage, and a control unit configured to control the position of the stage by supplying, to the driving unit, a signal composed of a first signal for reducing a deviation between a current position of the stage and a target position, and a second signal for reducing vibration of the stage caused by a thrust ripple included in the thrust.
Public/Granted literature
- US20150362846A1 STAGE APPARATUS, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING AN ARTICLE, AND DETERMINATION METHOD Public/Granted day:2015-12-17
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