Invention Grant
- Patent Title: Oxide sintered body, production method therefor, target, and transparent conductive film
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Application No.: US14641981Application Date: 2015-03-09
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Publication No.: US09721770B2Publication Date: 2017-08-01
- Inventor: Tokuyuki Nakayama , Yoshiyuki Abe
- Applicant: SUMITOMO METAL MINING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2009-182761 20090805
- Main IPC: C23C14/08
- IPC: C23C14/08 ; H01B1/08 ; H01J37/34 ; C23C14/34 ; H01L33/42 ; H01L31/0224 ; H01J1/00

Abstract:
A target for sputtering which enables to attain high rate film-formation of a transparent conductive film suitable for a blue LED or a solar cell. A oxide sintered body includes an indium oxide and a cerium oxide, and one or more oxide of titanium, zirconium, hafnium, molybdenum and tungsten. The cerium content is 0.3 to 9% by atom, as an atomicity ratio of Ce/(In+Ce), and the content of cerium is equal to or lower than 9% by atom, as an atomicity ratio of Ce/(In+Ce). The oxide sintered body has an In2O3 phase of a bixbyite structure has a CeO2 phase of a fluorite-type structure finely dispersed as crystal grains having an average particle diameter of equal to or smaller than 3 μm.
Public/Granted literature
- US20150235820A1 OXIDE SINTERED BODY, PRODUCTION METHOD THEREFOR, TARGET, AND TRANSPARENT CONDUCTIVE FILM Public/Granted day:2015-08-20
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