Invention Grant
- Patent Title: Method of transferring micro-device
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Application No.: US15248070Application Date: 2016-08-26
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Publication No.: US09721823B2Publication Date: 2017-08-01
- Inventor: Tsung-Tien Wu , Ho-Cheng Lee , Kang-Hung Liu , Chih-Che Kuo
- Applicant: AU Optronics Corporation
- Applicant Address: TW Hsin-Chu
- Assignee: AU OPTRONICS CORPORATION
- Current Assignee: AU OPTRONICS CORPORATION
- Current Assignee Address: TW Hsin-Chu
- Agency: WPAT, PC
- Priority: TW104136599A 20151106
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67 ; H01L33/00

Abstract:
A method of transferring micro-devices is provided. A carrying unit including a carrying substrate, a plurality of electrodes, a dielectric layer covering the electrodes, and a plurality of micro-devices disposed on the electrodes, including a first micro-device and a second micro-device, are also provided. A voltage is applied to an electrode corresponding to the first micro-device, so that an electrostatic force generated on the first micro-device by the carrying unit is larger than a force generated on the second micro-device by the carrying unit. A transfer stamp contacts the first micro-device and the second micro-device, and moves when the transfer stamp contacts the first micro-device and the second micro-device and the electrostatic force is greater than the force generated by the carrying unit, so that the second micro-device is picked up by the transfer stamp and transferred to a receiving unit, and the first micro-device remains on the carrying unit.
Public/Granted literature
- US20170133257A1 METHOD OF TRANSFERRING MICRO-DEVICE Public/Granted day:2017-05-11
Information query
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