Invention Grant
- Patent Title: Implementing resistance defect performance mitigation using test signature directed self heating and increased voltage
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Application No.: US14750471Application Date: 2015-06-25
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Publication No.: US09721856B2Publication Date: 2017-08-01
- Inventor: Karl R. Erickson , Phil C. Paone , David P. Paulsen , John E. Sheets, II , Gregory J. Uhlmann
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Joan Pennington
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G05B19/418 ; G01R31/28 ; G01R31/317
Abstract:
A method and system are provided for implementing resistive defect performance mitigation for integrated circuits. A test is generated for identifying resistive defects. A first self heating repair process is performed for repairing resistive defects. Testing is performed to identify a mitigated resistive defect and a functional integrated circuit. Responsive to identifying a resistive defect not being mitigated and a functional integrated circuit, a second repair process is performed, then testing is performed again.
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