- Patent Title: Creation of wide band gap material for integration to SOI thereof
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Application No.: US14788703Application Date: 2015-06-30
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Publication No.: US09721969B2Publication Date: 2017-08-01
- Inventor: Purakh Raj Verma , Shaoqiang Zhang
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte Ltd.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L27/12 ; H01L29/16 ; H01L29/20 ; H01L21/84 ; H01L21/8252

Abstract:
Devices and methods for forming a device are presented. The method for forming the device includes providing a support substrate having first crystal orientation. A trap rich layer is formed on the support substrate. An insulator layer is formed over a top surface of the trap rich layer. The method further includes forming a top surface layer having second crystal orientation on the insulator layer. The support substrate, the trap rich layer, the insulator layer and the top surface layer correspond to a substrate and the substrate is defined with at least first and second device regions. A transistor is formed in the top surface layer in the first device region and a wide band gap device is formed in the second device region.
Public/Granted literature
- US20170005111A1 CREATION OF WIDE BAND GAP MATERIAL FOR INTEGRATION TO SOI THEREOF Public/Granted day:2017-01-05
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