Invention Grant
- Patent Title: Thin film electronic component
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Application No.: US14835360Application Date: 2015-08-25
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Publication No.: US09722013B2Publication Date: 2017-08-01
- Inventor: Kentaro Morito , Daiki Ishii
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2014-171344 20140826
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L49/02 ; H01L21/768 ; H01L27/02

Abstract:
A thin film electronic component includes: a substrate; a thin film electrode layer over the substrate; an inorganic insulation layer formed on the thin film electrode layer; an organic insulation layer formed on the inorganic insulation layer; and a lead-out electrode that electrically connects to the thin film electrode layer. The inorganic insulation layer has a through-hole formed therein, so as to expose a portion of the thin film electrode layer. The organic insulation layer has a through-hole formed therein, so as to expose the through-hole in the inorganic insulation layer. The lead-out electrode is formed in the through-hole in the inorganic insulation layer and the through-hole in the organic insulation layer. A shape of a borderline defining the through-hole at a top surface of the organic insulation layer in a plan view has chamfered corners.
Public/Granted literature
- US20160064473A1 THIN FILM ELECTRONIC COMPONENT Public/Granted day:2016-03-03
Information query
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