Invention Grant
- Patent Title: Semiconductor device
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Application No.: US15106918Application Date: 2014-10-16
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Publication No.: US09722075B2Publication Date: 2017-08-01
- Inventor: Akitaka Soeno , Yuji Fukuoka
- Applicant: Akitaka Soeno , Yuji Fukuoka
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Oliff PLC
- Priority: JP2013-267786 20131225
- International Application: PCT/JP2014/077497 WO 20141016
- International Announcement: WO2015/098246 WO 20150702
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/739 ; H01L29/06

Abstract:
Described herein is a semiconductor device including a semiconductor substrate in which an element region and a termination region surrounding the element region are provided. The element region includes: a gate trench; a gate insulating film; and a gate electrode. The termination region includes: a plurality of termination trenches provided around the element region; an inner trench insulating layer located inside of each of the plurality of termination trenches; and an upper surface insulating layer located at an upper surface of the semiconductor substrate in the termination region. The upper surface insulating layer includes a first portion and a second portion having a thinner thickness than the first portion and located at a location separated from the element region than the first portion, and a gate wiring is located at an upper surface of the first portion and is not located at an upper surface of the second portion.
Public/Granted literature
- US20170040448A1 SEMICONDUCTOR DEVICE Public/Granted day:2017-02-09
Information query
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