Invention Grant
- Patent Title: Light sensing device with outgassing hole in a light shielding layer and an anti-reflection film
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Application No.: US13949993Application Date: 2013-07-24
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Publication No.: US09722099B2Publication Date: 2017-08-01
- Inventor: Tsung-Han Tsai , Kuo-Cheng Lee , Shiu-Ko JangJian , Chi-Cherng Jeng
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L31/0216
- IPC: H01L31/0216 ; H01L27/146
Abstract:
A light sensing device includes a substrate, a light sensing area on the substrate, and a light shielding layer over the substrate. The light shielding layer does not cover the light sensing area. At least one outgassing hole is formed through the light shielding layer.
Public/Granted literature
- US20140263944A1 Light Sensing Device with Outgassing Hole Public/Granted day:2014-09-18
Information query
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