Invention Grant
- Patent Title: Sensor device and method
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Application No.: US13358316Application Date: 2012-01-25
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Publication No.: US09728652B2Publication Date: 2017-08-08
- Inventor: Klaus Elian , Franz-Peter Kalz , Horst Theuss
- Applicant: Klaus Elian , Franz-Peter Kalz , Horst Theuss
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L29/66 ; B81C1/00 ; G01P15/12 ; G01L1/20
Abstract:
A sensor device includes a semiconductor chip. The semiconductor chip has a sensing region sensitive to mechanical loading. A pillar is mechanically coupled to the sensing region.
Public/Granted literature
- US20130187201A1 Sensor Device and Method Public/Granted day:2013-07-25
Information query
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