Invention Grant
- Patent Title: Physical quantity sensor, electronic apparatus, and moving body
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Application No.: US14817324Application Date: 2015-08-04
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Publication No.: US09746490B2Publication Date: 2017-08-29
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-164907 20140813; JP2015-114927 20150605
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01C19/56 ; G01C19/5719 ; B81B3/00 ; G01P15/08

Abstract:
A physical quantity sensor includes: a base substrate; a movable portion; a plurality of movable electrode fingers which are provided in the movable portion; a fixed electrode finger which is provided on the base substrate; and a fixing portion which fixes the movable portion to the base substrate. In the movable electrode fingers, a movable electrode finger which opposes the fixing portion in the first direction is included. A clearance between the movable electrode finger and the fixing portion is smaller than a clearance between the movable electrode finger and the fixed electrode finger. The width of the movable electrode finger is greater than the width of other movable electrode finger.
Public/Granted literature
- US20160047837A1 PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING BODY Public/Granted day:2016-02-18
Information query
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