Invention Grant
- Patent Title: Titania-doped quartz glass and making method
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Application No.: US13920628Application Date: 2013-06-18
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Publication No.: US09746773B2Publication Date: 2017-08-29
- Inventor: Shigeru Maida , Hisatoshi Otsuka , Tetsuji Ueda , Masanobu Ezaki
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2009-294557 20091225
- Main IPC: C03B19/14
- IPC: C03B19/14 ; G03F7/20 ; B82Y10/00 ; B82Y40/00 ; C03C3/06 ; G03F1/24
Abstract:
Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours as suitable material for the EUV lithography member.
Public/Granted literature
- US20130283858A1 TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD Public/Granted day:2013-10-31
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