Invention Grant
- Patent Title: Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
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Application No.: US13932926Application Date: 2013-07-01
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Publication No.: US09748120B2Publication Date: 2017-08-29
- Inventor: Kevin Matthew Crabb , Philipp Engesser , Vijay Kumar Badam
- Applicant: LAM RESEARCH AG
- Applicant Address: AT Villach
- Assignee: LAM RESEARCH AG
- Current Assignee: LAM RESEARCH AG
- Current Assignee Address: AT Villach
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/687 ; F27B5/14 ; F27D5/00 ; F27D11/02 ; H01L21/67 ; F27B17/00 ; F27D99/00
Abstract:
An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. The infrared heating elements are arranged in a nested configuration so as to define individually controllable inner, middle and outer heating zones adjacent a disc-shaped article when positioned on the spin chuck.
Public/Granted literature
- US20150001202A1 APPARATUS FOR LIQUID TREATMENT OF DISC-SHAPED ARTICLES AND HEATING SYSTEM FOR USE IN SUCH APPARATUS Public/Granted day:2015-01-01
Information query
IPC分类:
