Invention Grant
- Patent Title: Semiconductor devices having dummy patterns and methods of fabricating the same
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Application No.: US14962237Application Date: 2015-12-08
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Publication No.: US09748257B2Publication Date: 2017-08-29
- Inventor: Jaehan Lee , Won-Seok Jung , Kyungjoong Joo
- Applicant: Jaehan Lee , Won-Seok Jung , Kyungjoong Joo
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2014-0175184 20141208
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11565 ; H01L27/11524 ; H01L27/11512 ; H01L27/11556 ; H01L27/1157 ; H01L27/11573 ; H01L27/11575 ; H01L27/11582

Abstract:
Provided are semiconductor devices and methods of fabricating the same. The semiconductor devices may include a substrate with a cell region and a peripheral region, a gate stack including gates stacked on the cell region of the substrate. At least one edge portion of the gate stack may have a staircase structure. The semiconductor devices may also include a channel that extend through the gate stack and is enclosed by a memory layer and at least two dummy patterns on the substrate. The at least two dummy patterns may be spaced apart from the gate stack and may be spaced apart from each other.
Public/Granted literature
- US20160163686A1 SEMICONDUCTOR DEVICES HAVING DUMMY PATTERNS AND METHODS OF FABRICATING THE SAME Public/Granted day:2016-06-09
Information query
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