Invention Grant
- Patent Title: Method of fabricating magnetic core inductors for an integrated voltage regulator
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Application No.: US13898937Application Date: 2013-05-21
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Publication No.: US09748324B2Publication Date: 2017-08-29
- Inventor: Wen-Shiang Liao
- Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01F7/06
- IPC: H01F7/06 ; H01L49/02 ; H02M3/158 ; H01F21/02 ; H02M1/00 ; H01F17/00
Abstract:
Methods of fabricating magnetic core inductors for an integrated voltage regulator are disclosed. In some methods, an insulating layer is attached upon a carrier layer, and the insulating layer is patterned to form a core area and a trench area. A conductive inner core is formed in the core area. A magnetic winding coil is formed in the trench area.
Public/Granted literature
- US20140347025A1 Integrated Voltage Regulator Substrate System and Methods Having a Coupled-Magnetic-Core Inductor Public/Granted day:2014-11-27
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