Invention Grant
- Patent Title: Transistor and fabrication method thereof
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Application No.: US15073772Application Date: 2016-03-18
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Publication No.: US09748405B2Publication Date: 2017-08-29
- Inventor: Deyuan Xiao
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201510149074 20150331
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L29/06 ; H01L29/423 ; H01L29/66

Abstract:
A method for fabricating a transistor is provided. The method includes providing a semiconductor substrate; and forming at least a nanowire suspending in the semiconductor substrate. The method also includes forming a channel layer surrounding the nanowire; and forming a contact layer surrounding the channel layer. Further, the method includes forming a trench exposing the channel layer and surrounding the channel layer in the contact layer; and forming a potential barrier layer on the bottom of the trench and surrounding the channel layer. Further, the method also includes forming a gate structure surrounding the potential barrier layer and covering portions of the contact layer; and forming a source and a drain region on the contact layer at two sides of the gate structure, respectively.
Public/Granted literature
- US20160293772A1 TRANSISTOR AND FABRICATION METHOD THEREOF Public/Granted day:2016-10-06
Information query
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