Invention Grant
- Patent Title: Method of fabrication of Al/Ge bonding in a wafer packaging environment and a product produced therefrom
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Application No.: US15364478Application Date: 2016-11-30
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Publication No.: US09751752B2Publication Date: 2017-09-05
- Inventor: Steven S. Nasiri , Anthony F. Flannery, Jr.
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L31/036 ; H01L31/0376 ; H01L31/20 ; H01L27/14 ; H01L29/82 ; H01L29/84 ; B81C1/00 ; H01L21/18 ; B81B3/00 ; B81C3/00 ; B23K20/02 ; B81B7/00

Abstract:
A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.
Public/Granted literature
- US20170073223A1 METHOD OF FABRICATION OF AL/GE BONDING IN A WAFER PACKAGING ENVIRONMENT AND A PRODUCT PRODUCED THEREFROM Public/Granted day:2017-03-16
Information query
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