Invention Grant
- Patent Title: Integration of active devices with passive components and MEMS devices
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Application No.: US15256340Application Date: 2016-09-02
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Publication No.: US09751753B2Publication Date: 2017-09-05
- Inventor: Michael J. DeBar , David J. Howard , Jeff Rose
- Applicant: Newport Fab, LLC
- Applicant Address: US CA Newport Beach
- Assignee: Newport Fab, LLC
- Current Assignee: Newport Fab, LLC
- Current Assignee Address: US CA Newport Beach
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: B81C1/00
- IPC: B81C1/00

Abstract:
Integration of active devices with passive components and MEMS devices is disclosed. An integrated semiconductor structure includes an active device having a device top electrode connected to a conductive jumper by a device-side via/interconnect metal stack. The integrated semiconductor structure also includes a passive component having a component bottom plate connected to the conductive jumper by a component side via/interconnect metal stack. The component bottom plate is situated at an intermediate metal level higher than the device top electrode, and the conductive jumper is situated at a connecting metal level higher than the component bottom plate. The conductive jumper reduces undesirable charge flow into the active device during fabrication of the passive component. The passive component can be, for example, a MEMS device.
Public/Granted literature
- US20160368764A1 Integration Of Active Devices With Passive Components And MEMS Devices Public/Granted day:2016-12-22
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