Invention Grant
- Patent Title: Sintering apparatus and method for sintering
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Application No.: US15080467Application Date: 2016-03-24
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Publication No.: US09751796B2Publication Date: 2017-09-05
- Inventor: Kazuya Uchida , Tetsuya Otosaka
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Ibaraki
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Ibaraki
- Priority: JP2015-060873 20150324; JP2016-057846 20160323
- Main IPC: C03B37/012
- IPC: C03B37/012 ; C03B19/06 ; C03B37/014

Abstract:
A sintering apparatus for sintering a porous glass base material, including a furnace core tube surrounded by heaters, the furnace core tube housing the porous glass base material; a lid member having an insertion hole through which a holding rod coupled with the porous glass base material is inserted, the lid member mounted at one end of the furnace core tube; a sealing chamber having a supply port that introduces seal gas and a discharging port that discharges the seal gas, the sealing chamber provided at the lid member covering the insertion hole; and a cylindrical member that causes a pressure difference between gas inside of the tube of an inside the furnace core tube and gas inside of the sealing chamber to be generated while the holding rod is inserted through the cylindrical member inside of the sealing chamber.
Public/Granted literature
- US20160280583A1 SINTERING APPARATUS AND METHOD FOR SINTERING Public/Granted day:2016-09-29
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