Invention Grant
- Patent Title: Methods and apparatuses for dynamically tunable wafer-edge electroplating
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Application No.: US14578068Application Date: 2014-12-19
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Publication No.: US09752248B2Publication Date: 2017-09-05
- Inventor: Burhanuddin Kagajwala , Bryan L. Buckalew , Aaron Berke , James Isaac Fortner , Robert Rash
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D17/02 ; C25D5/02

Abstract:
Disclosed herein are methods of electroplating which may include placing a substrate, an anode, and an electroplating solution in an electroplating cell such that the substrate and the anode are located on opposite sides of a fluidically-permeable plate, setting the configuration of one or more seals which, when in their sealing configuration, substantially seal pores of the fluidically-permeable plate, and applying an electrical potential between the anode and the first substrate sufficient to cause electroplating on the first substrate such that the rate of electroplating in an edge region of the first substrate is affected by the configuration of the one or more seals. Also disclosed herein are apparatuses for electroplating which may include one or more seals for substantially sealing a subset of the pores in a fluidically-permeable plate whose sealing configuration affects a rate of electroplating in an edge region of the substrate.
Public/Granted literature
- US20160177466A1 METHODS AND APPARATUSES FOR DYNAMICALLY TUNABLE WAFER-EDGE ELECTROPLATING Public/Granted day:2016-06-23
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