Invention Grant
- Patent Title: Film forming apparatus and film forming method
-
Application No.: US15062293Application Date: 2016-03-07
-
Publication No.: US09752249B2Publication Date: 2017-09-05
- Inventor: Motoki Hiraoka , Hiroshi Yanagimoto , Yuki Sato
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota-shi, Aichi-ken
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota-shi, Aichi-ken
- Agency: Sughrue Mion, PLLC
- Priority: JP2015-048021 20150311
- Main IPC: C25D17/12
- IPC: C25D17/12 ; C25D17/00 ; C25D5/04 ; C25D5/08 ; C25D3/00 ; C25D7/12

Abstract:
A film forming apparatus includes: an anode; a solid electrolyte membrane that is arranged between the anode and an substrate that serves as a cathode, and that contains metal ions; a power supply that applies a voltage between the anode and the substrate in a state in which the solid electrolyte membrane is in contact with the substrate from above; and an oscillating portion configured to oscillate at least the anode in the state in which the solid electrolyte membrane is in contact with the substrate.
Public/Granted literature
- US20160265126A1 FILM FORMING APPARATUS AND FILM FORMING METHOD Public/Granted day:2016-09-15
Information query