An elastomeric polymeric seal 10 includes a sealing surface 21 and an adjacent fluid repelling surface 20. The fluid repelling surface 20 is hydrophobic or superhydrophobic and is of substantially greater surface area than sealing surface 21. During manufacture of a silicone wafer 27, sealing surface 21 engages the wafer 27 to seal against leakage of electroplate solution fluid. The repelling surface 20 directs the electroplate solution fluid away from the sealing surface 21 during and after electroplating. The hydrophobic or superhydrophobic repelling surface includes a pattern of micro-pillars 51 and micro-channels between the pillars. The pillars are formed in the base material of the seal by laser ablation of the base material or by molding. Other seals 30 and 90 include a sealing surface and an adjacent hydrophobic or superhydrophobic repelling or stiction reduction surface. A fluidic device 95 includes plates 96 and 97 with micro-channels and micro-pillars.