Thermal flow meter with an asymmetrical inflow-side of circuit package
Abstract:
A thermal flow meter has improved measurement accuracy due to the shape of a circuit package. The circuit package has a measurement surface and a backside of a measurement surface of a rear surface thereof is located in a bypass passage, the bypass passage being configured to allow a measurement target gas to flow therein dividing the measurement target gas into a flow path at a side of the measurement surface and a flow path at a side of the backside of measurement surface of a rear surface thereof. An inflow-side end surface of the circuit package has different shapes at the side of the measurement surface and at the side of the backside of the measurement surface.
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