- Patent Title: Capacitance type transducer and method of manufacturing the same
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Application No.: US14511365Application Date: 2014-10-10
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Publication No.: US09752924B2Publication Date: 2017-09-05
- Inventor: Takahiro Akiyama , Kazutoshi Torashima
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2013-218822 20131022
- Main IPC: B06B1/02
- IPC: B06B1/02 ; G01H11/06 ; G01H9/00

Abstract:
A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode.
Public/Granted literature
- US20150107360A1 CAPACITANCE TYPE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-04-23
Information query
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