Invention Grant
- Patent Title: Microelectromechanical sensing structure for a pressure sensor including a deformable test structure
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Application No.: US14656391Application Date: 2015-03-12
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Publication No.: US09752944B2Publication Date: 2017-09-05
- Inventor: Alberto Pagani
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITTO2014A0193 20140312
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L27/00
Abstract:
A microelectromechanical sensing structure having a membrane region including a membrane that undergoes deformation as a function of a pressure and a first actuator that is controlled in a first operating mode and a second operating mode, the first actuator being such that, when it operates in the second operating mode, it contacts the membrane region and deforms the membrane in a way different from when it operates in the first operating mode.
Public/Granted literature
- US20150260597A1 MICROELECTROMECHANICAL SENSING STRUCTURE FOR A PRESSURE SENSOR INCLUDING A DEFORMABLE TEST STRUCTURE Public/Granted day:2015-09-17
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