Invention Grant
- Patent Title: Parallelism adjusting device and parallelism adjusting method
-
Application No.: US14269650Application Date: 2014-05-05
-
Publication No.: US09753083B2Publication Date: 2017-09-05
- Inventor: Shigeto Akahori , Nobuo Kambara
- Applicant: HONDA MOTOR CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: HONDA MOTOR CO., LTD.
- Current Assignee: HONDA MOTOR CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2013-098605 20130508
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/04 ; G01R1/067

Abstract:
A parallelism adjusting device and a parallelism adjusting method capable of adjusting the parallelism between the surface of a semiconductor and the surface of an electrode by reducing the load on the semiconductor and capable of shortening the cycle time by increasing the operating speed. A probe device of adjusting the parallelism between the surface and the surface of a contact body that is in contact with the surface to press the surface and apply a current is configured to include a pressing body assembly that presses the contact body with a predetermined pressing force until the surface and the surface come into contact with each other to adjust the parallelism and, after that, presses the contact body with a pressing force that is stronger than the predetermined pressing force.
Public/Granted literature
- US20140333334A1 PARALLELISM ADJUSTING DEVICE AND PARALLELISM ADJUSTING METHOD Public/Granted day:2014-11-13
Information query