Invention Grant
- Patent Title: Wire grid polarizer and method of fabricating the same
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Application No.: US14668617Application Date: 2015-03-25
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Publication No.: US09753201B2Publication Date: 2017-09-05
- Inventor: Su Mi Lee , Min Hyuck Kang
- Applicant: Samsung Display Co. Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2014-0156195 20141111
- Main IPC: G02B5/30
- IPC: G02B5/30 ; G03F7/00 ; B82Y40/00

Abstract:
Provided is a method of fabricating a wire grid polarizer, the method comprising an organic light-emitting display panel. According to an aspect of the present disclosure, there is provided a method comprising sequentially stacking a conductive wire pattern layer, a first neutral layer, a guide pattern layer and a second neutral layer on a substrate, forming etch-stop patterns on the second neutral layer, forming second neutral layer patterns and guide patterns by patterning the second neutral layer and the guide pattern layer using the etch-stop patterns, coating a block copolymer of two types of monomer blocks having different etch rates on the first neutral layer and the second neutral layer patterns, aligning the block copolymer, removing one type of monomer blocks from the aligned block copolymer, and patterning the conductive wire pattern layer using the remaining monomer blocks, the second neutral layer patterns, and the guide patterns.
Public/Granted literature
- US20160131811A1 WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-05-12
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