Invention Grant
- Patent Title: Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof
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Application No.: US14564237Application Date: 2014-12-09
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Publication No.: US09753279B2Publication Date: 2017-09-05
- Inventor: Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
- Applicant: STMicroelectronics S.r.l. , STMicroelectronics International N.V.
- Applicant Address: IT Agrate Brianza NL Amsterdam
- Assignee: STMicroelectronics S.R.L.,STMicroelectronics International N.V.
- Current Assignee: STMicroelectronics S.R.L.,STMicroelectronics International N.V.
- Current Assignee Address: IT Agrate Brianza NL Amsterdam
- Agency: Gardere Wynne Sewell LLP
- Priority: ITTO2013A1014 20131212
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H04N9/31 ; H02N1/00 ; B81B3/00 ; G02B27/10

Abstract:
An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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