Invention Grant
- Patent Title: High damage threshold frequency conversion system
-
Application No.: US14838686Application Date: 2015-08-28
-
Publication No.: US09753352B1Publication Date: 2017-09-05
- Inventor: J. Joseph Armstrong
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G02F1/35
- IPC: G02F1/35 ; G02F1/37 ; G02B27/14 ; G02B3/06 ; G02B27/00 ; G02B5/30 ; H01S3/00 ; G01N21/95 ; G01N21/88

Abstract:
The present invention includes a fundamental laser light source configured to generate fundamental wavelength laser light, a first nonlinear optical crystal configured to generate first alternate wavelength light, a second nonlinear optical crystal configured to generate second alternate wavelength light, a set of Brewster angle wavefront processing optics configured to condition the first and second alternate wavelengths of light, and a harmonic separator configured to receive the first alternate wavelength light and the second alternate wavelength light from the set of Brewster angle wavefront processing optics, the harmonic separator configured to at least partially separate the first alternate wavelength light from the second alternate wavelength light.
Information query