Invention Grant
- Patent Title: Dicing sheet with protective film forming layer and method for producing chip
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Application No.: US14423144Application Date: 2013-08-22
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Publication No.: US09754811B2Publication Date: 2017-09-05
- Inventor: Naoya Saeki , Tomonori Shinoda , Ken Takano
- Applicant: LINTEC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: LINTEC CORPORATION
- Current Assignee: LINTEC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Nixon & Vanderhye P.C.
- Priority: JP2012-184167 20120823
- International Application: PCT/JP2013/072415 WO 20130822
- International Announcement: WO2014/030699 WO 20140227
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/683 ; C09J163/00 ; C09J7/02 ; H01L21/78 ; H01L23/544

Abstract:
[Problem] To provide a dicing sheet that is with a protective film formation layer, can easily produce a semiconductor chip having a protective film having high uniformity and superior printing precision, is such that the peeling of the protective film and the dicing sheet can be easily performed, and has superior affixing ability of chips during dicing. [Solution] The dicing sheet with a protective film formation layer is characterized by a protective film formation layer being peelably provided on the adhesive layer of an adhesive sheet resulting from the adhesive layer, which contains an adhesive component and a free epoxy group-containing compound, being laminated onto a substrate film.
Public/Granted literature
- US20150228526A1 DICING SHEET WITH PROTECTIVE FILM FORMING LAYER AND METHOD FOR PRODUCING CHIP Public/Granted day:2015-08-13
Information query
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