Invention Grant
- Patent Title: Semiconductor transistor device and fabrication method thereof
-
Application No.: US15200000Application Date: 2016-07-01
-
Publication No.: US09754828B1Publication Date: 2017-09-05
- Inventor: Zhibiao Zhou , Ding-Lung Chen , Xing Hua Zhang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201610421311 20160613
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/768 ; H01L29/06 ; H01L29/45 ; H01L29/423 ; H01L29/40 ; H01L21/02 ; H01L29/66 ; H01L29/78

Abstract:
A semiconductor transistor device includes a substrate having an active area and a trench isolation region surrounding the active area, a gate oxide layer, a gate, a spacer on a sidewall of the gate, a doping region on one side of the gate, an insulating cap layer covering the gate, the spacer and the doping region, and a redistributed contact layer (RCL) on the insulating cap layer. The RCL extends from the active area to the trench isolation region. A contact plug is disposed above the trench isolation region and is electrically connected to the gate or the doping region through the RCL.
Information query
IPC分类: