Invention Grant
- Patent Title: Wafer with liquid molding compound and post-passivation interconnect
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Application No.: US14932530Application Date: 2015-11-04
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Publication No.: US09754908B2Publication Date: 2017-09-05
- Inventor: Chung-Shi Liu , Chia-Wei Tu , Ming-Da Cheng , Wen-Hsiung Lu , Yu-Peng Tsai
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/31 ; H01L21/78 ; H01L23/29 ; H01L21/56 ; H01L23/532 ; H01L23/522 ; H01L23/528 ; H01L23/525

Abstract:
A method includes forming a passivation layer over a metal pad, wherein the metal pad is further overlying a semiconductor substrate of a wafer. A Post-Passivation Interconnect (PPI) is formed to electrically couple to the metal pad, wherein a portion of the PPI is overlying the passivation layer. A metal bump is formed over and electrically coupled to the PPI. The method further includes applying a molding compound over the metal bump and the PPI, applying a release film over the molding compound, pressing the release film against the molding compound, and curing the molding compound when the release film is pressed against the molding compound. The release film is then removed from the molding compound. The wafer is sawed into dies using a blade, with the blade cutting through the molding compound.
Public/Granted literature
- US20160056117A1 Directly Sawing Wafers Covered with Liquid Molding Compound Public/Granted day:2016-02-25
Information query
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