Invention Grant
- Patent Title: Static random access memory and fabrication methods thereof
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Application No.: US14445948Application Date: 2014-07-29
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Publication No.: US09754947B2Publication Date: 2017-09-05
- Inventor: Gong Zhang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201410025102 20140120
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/02

Abstract:
A method for fabricating a static random access memory is provided. The method includes providing a semiconductor substrate. The method also includes forming a plurality of transistors on the semiconductor substrate. Further, the method includes forming a first metal layer having a word line electrically connecting with a partial number of the transistors. Further, the method also includes forming a second metal layer having a first bit line, a second bit line, a first power source line and second power source lines electrically connect with a partial number of the transistors.
Public/Granted literature
- US20150206888A1 STATIC RANDOM ACCESS MEMORY AND FABRICATION METHODS THEREOF Public/Granted day:2015-07-23
Information query
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