Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
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Application No.: US15045526Application Date: 2016-02-17
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Publication No.: US09754961B2Publication Date: 2017-09-05
- Inventor: Hiroyuki Yamasaki , Makoto Fujiwara , Daisuke Nishida
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/04 ; H01L21/02 ; H01L29/10 ; H01L27/11582 ; H01L27/1157

Abstract:
According to one embodiment, a semiconductor memory device includes a substrate; a stacked body including a plurality of insulating layers and including a first insulating layer and a plurality of conductive layers including a first conductive layer; a first semiconductor film extending in a stacking direction of the stacked body; a second semiconductor film, the second semiconductor film having a maximum thickness thicker than a maximum thickness of the first semiconductor film in a first direction crossing the stacking direction; and a first insulating film. The second semiconductor film has an upper face, and a height of the upper face is lower than a height of the first conductive layer. The first insulating film has a lower end portion, and a height of the lower end portion of the first insulating film is lower than the height of the upper face of the second semiconductor film.
Public/Granted literature
- US20170077125A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2017-03-16
Information query
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